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半导体制造/WAFER FAB >> 晶圆探针台
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晶圆探针台 Wafer Prober
| Wafer size |
100mm (4 inch) to 200mm (8 inch) |
| Probing area |
Wafer: φ200mm |
| XY stage |
Driven by linear motor (Repeat accuracy:1um) |
| Footprint |
Small space: (W)1200mm × (D)860mm |
| Wafer size |
200mm (8 inch) to 300mm (12 inch) |
| Probing area |
Wafer: φ300mm |
| XY stage |
Driven by linear motor (Repeat accuracy:1um) |
| Footprint |
Small space: (W)1615mm × (D)1000mm |
WLCSP (特殊基板，QFN) 晶圆探针台
 
| Film Frame size |
2-8-1(φ200mm)
Supports 2-6-1 by changing chuck (OP)
Supports echo-ring, square ring (OP) |
| Probing area |
Wafer: φ200mm
Max: (X)214mm × (Y)214mm ※Contact us for detail |
| XY stage |
Driven by linear motor (Repeat accuracy:1um) |
| Footprint |
Small space: (W)1200mm × (D)860mm |
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| 点击数：1690 录入时间：2021/7/27 【打印此页】 【返回】 |
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